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Dong Dong, Xiao-Bo Liu, Jiang-Bo Li, Cheng-Wei Shang, Wen-Cheng Hu. Effects of Growth Conditions on the Microstructure Characteristics of CdS Thin Films by AP-MOCVD[J]. Journal of Electronic Science and Technology, 2010, 8(2): 149-153. DOI: 10.3969/j.issn.1674-862X.2010.02.011
Citation: Dong Dong, Xiao-Bo Liu, Jiang-Bo Li, Cheng-Wei Shang, Wen-Cheng Hu. Effects of Growth Conditions on the Microstructure Characteristics of CdS Thin Films by AP-MOCVD[J]. Journal of Electronic Science and Technology, 2010, 8(2): 149-153. DOI: 10.3969/j.issn.1674-862X.2010.02.011
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Effects of Growth Conditions on the Microstructure Characteristics of CdS Thin Films by AP-MOCVD

doi: 10.3969/j.issn.1674-862X.2010.02.011

  • State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China

Funds: 

This work was supported by the Project of Key Technologies Research Development Programme of Chengdu under Grant No. 06GGYB512GX-030.

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  • Author Bio:

    Dong Dong research interests include nano materials and functional thin films, huwc@uestc.edu.cn

  • Received Date: 2009-06-23
  • Rev Recd Date: 2010-01-19
  • Publish Date: 2010-06-24
    Abstract
  • Growth of cadmium sulfide (CdS) thin films on glass substrates was carried out by atmospheric pressure metal-organic chemical vapor deposition (AP-MOCVD) using Cd(S2CNEt2)2 as the single precursor. Changes in the surface morphology of the deposited CdS thin films were investigated by atomic force microscope (AFM) as the function of substrate temperature (Ts), vaporizing temperature (Tv), and Ar flow rate. With the increase of Tv, CdS thin films evolved from pyramidal structure with fine grains to columnar structure with large grains. X-ray diffraction (XRD) patterns indicated that the CdS films had random orientation at the lower Tv and preferred orientation at the higher Tv. In addition, Ts had a great effect on the surface roughness of the CdS films, and a quantum dot-like structural CdS films were obtained in a narrow range of Ts with high Ar flow rate. Furthermore, the optical properties of the CdS films were measured using ultraviolet-visible (UV/VIS) spectrometer.
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