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Shi-Feng Zou, Pei-Heng Zhou, Xin Wang, Jian-Liang Xie, Long-Jiang Deng. Effects of Heat Treatment on Thermoelectric and Infrared Properties of Bi2Te3 Films[J]. Journal of Electronic Science and Technology, 2016, 14(1): 87-93. DOI: 10.11989/JEST.1674-862X.412021
Citation: Shi-Feng Zou, Pei-Heng Zhou, Xin Wang, Jian-Liang Xie, Long-Jiang Deng. Effects of Heat Treatment on Thermoelectric and Infrared Properties of Bi2Te3 Films[J]. Journal of Electronic Science and Technology, 2016, 14(1): 87-93. DOI: 10.11989/JEST.1674-862X.412021
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Effects of Heat Treatment on Thermoelectric and Infrared Properties of Bi2Te3 Films

doi: 10.11989/JEST.1674-862X.412021

  • School of Microelectronics and Solid-State Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China

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This work was supported by the National Natural Science Foundation of China under Grant No. 51025208 and Program for Changjiang Scholars and Innovative Research Team in University under Grant No. IRT1309.

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  • Author Bio:

    Shi-Feng Zou research interests are thermoelectric materials and infrared functional materials, sfzou@163.com;
    Pei-Heng Zhou research interests are in various aspects of electromagnetic material or structure, particularly the interplay between electromagnetic wave and material's characteristics, phzhou@uestc.edu.cn;
    Xin Wang, wx652@126.com;
    Jian-Liang Xie, jlxie@uestc.edu.cn;
    Long-Liang Deng, denglj@uestc.edu.cn.

    Shi-Feng Zou research interests are thermoelectric materials and infrared functional materials, sfzou@163.com;
    Pei-Heng Zhou research interests are in various aspects of electromagnetic material or structure, particularly the interplay between electromagnetic wave and material's characteristics, phzhou@uestc.edu.cn;
    Xin Wang, wx652@126.com;
    Jian-Liang Xie, jlxie@uestc.edu.cn;
    Long-Liang Deng, denglj@uestc.edu.cn.

    Shi-Feng Zou research interests are thermoelectric materials and infrared functional materials, sfzou@163.com;
    Pei-Heng Zhou research interests are in various aspects of electromagnetic material or structure, particularly the interplay between electromagnetic wave and material's characteristics, phzhou@uestc.edu.cn;
    Xin Wang, wx652@126.com;
    Jian-Liang Xie, jlxie@uestc.edu.cn;
    Long-Liang Deng, denglj@uestc.edu.cn.

    Shi-Feng Zou research interests are thermoelectric materials and infrared functional materials, sfzou@163.com;
    Pei-Heng Zhou research interests are in various aspects of electromagnetic material or structure, particularly the interplay between electromagnetic wave and material's characteristics, phzhou@uestc.edu.cn;
    Xin Wang, wx652@126.com;
    Jian-Liang Xie, jlxie@uestc.edu.cn;
    Long-Liang Deng, denglj@uestc.edu.cn.

  • Authors’ information: Pei-Heng Zhou
  • Received Date: 2015-04-09
  • Rev Recd Date: 2015-07-25
  • Publish Date: 2016-03-24
    Abstract
  • In this work, Bi2Te3 films (250 nm) are fabricated on SiO2/Si substrates by radio frequency (RF) magnetron sputtering at room temperature, and the prepared films are annealed over the temperature range of 200 ℃ to 400 ℃. Crystallinity and electrical properties of the films can be tuned correspondingly. The power factors of Bi2Te3 films of 0.85 W/K2cm to 11.43 W/K2cm were achieved after annealing. The infrared reflectance measurements from 2.5 m to 5.0 m demonstrate that there is also a slight red-shift of the plasma oscillation frequency in the Bi2Te3 films. By means of plasmonic calculations, we attribute the red-shift of absorption peaks to the reduction of carrier concentration and the change of effective mass of Bi2Te3 films with the increased annealing temperature.
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