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Tan-Loc Nguyen, Jing-Fu Bao, Jun-Wen Jiang, Yuan Ling, Xin-Yi Li. A 10-MHz SOI-Based Face Shear Square Micromechanical Resonator[J]. Journal of Electronic Science and Technology, 2014, 12(1): 64-70. DOI: 10.3969/j.issn.1674-862X.2014.01.013
Citation: Tan-Loc Nguyen, Jing-Fu Bao, Jun-Wen Jiang, Yuan Ling, Xin-Yi Li. A 10-MHz SOI-Based Face Shear Square Micromechanical Resonator[J]. Journal of Electronic Science and Technology, 2014, 12(1): 64-70. DOI: 10.3969/j.issn.1674-862X.2014.01.013
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A 10-MHz SOI-Based Face Shear Square Micromechanical Resonator

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