Volume 5 Issue 4
Apr.  2017
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Ting Zhang, Shu-Ren Zhang, Meng-Qiang Wu, Wei-Jun Sang, Zheng-Ping Gao, Zhong-Ping Li. Studies on Dielectric Properties of Silicon Nitride at High Temperature[J]. Journal of Electronic Science and Technology, 2007, 5(4): 316-319.
Citation: Ting Zhang, Shu-Ren Zhang, Meng-Qiang Wu, Wei-Jun Sang, Zheng-Ping Gao, Zhong-Ping Li. Studies on Dielectric Properties of Silicon Nitride at High Temperature[J]. Journal of Electronic Science and Technology, 2007, 5(4): 316-319.

Studies on Dielectric Properties of Silicon Nitride at High Temperature

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  • Author Bio:

    Ting Zhang research interests include dielectric material, flyrain68@126.com

  • Received Date: 2007-08-15
  • Rev Recd Date: 2007-09-10
  • Publish Date: 2007-12-25

通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Studies on Dielectric Properties of Silicon Nitride at High Temperature

  • Author Bio:

Abstract: In this paper, the dielectric properties of silicon nitride are studied using the dielectric polarization theories. According to the developed dielectric models, the temperature dependence of dielectric constant and loss of silicon nitride is mainly analyzed. In addition, the impact of Li+, K+, Ca2+, Al3+ and Mg2+ doping on the dielectric properties of silicon nitride are also estimated.

Ting Zhang, Shu-Ren Zhang, Meng-Qiang Wu, Wei-Jun Sang, Zheng-Ping Gao, Zhong-Ping Li. Studies on Dielectric Properties of Silicon Nitride at High Temperature[J]. Journal of Electronic Science and Technology, 2007, 5(4): 316-319.
Citation: Ting Zhang, Shu-Ren Zhang, Meng-Qiang Wu, Wei-Jun Sang, Zheng-Ping Gao, Zhong-Ping Li. Studies on Dielectric Properties of Silicon Nitride at High Temperature[J]. Journal of Electronic Science and Technology, 2007, 5(4): 316-319.

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