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Yi-Xian Ge, Ming Wang, Hai-Tao Yan. Mesa Diaphragm-Based Fabry-Perot Optical MEMS Pressure Sensor[J]. Journal of Electronic Science and Technology, 2008, 6(4): 466-469.
Citation: Yi-Xian Ge, Ming Wang, Hai-Tao Yan. Mesa Diaphragm-Based Fabry-Perot Optical MEMS Pressure Sensor[J]. Journal of Electronic Science and Technology, 2008, 6(4): 466-469.
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Mesa Diaphragm-Based Fabry-Perot Optical MEMS Pressure Sensor

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