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CHEN Zhu, ZENG Yong, YANG Cheng-tao, YANG Bang-chao, WANG Sheng, LI Jin-long, SUN Ming-xia. Lattice Constant α Calculation of PZT Films Prepared by a New Modified Sol-Gel Method[J]. Journal of Electronic Science and Technology, 2005, 3(2): 168-171.
Citation: CHEN Zhu, ZENG Yong, YANG Cheng-tao, YANG Bang-chao, WANG Sheng, LI Jin-long, SUN Ming-xia. Lattice Constant α Calculation of PZT Films Prepared by a New Modified Sol-Gel Method[J]. Journal of Electronic Science and Technology, 2005, 3(2): 168-171.
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Lattice Constant α Calculation of PZT Films Prepared by a New Modified Sol-Gel Method

  • 1.

    School of Microelectronics and Solid-State Electronics,University of Electronic Science and Technology of China Chengdu 610054 China;

  • 2.

    College of Computer Science and Technology,Southwest University for Nationalities Chengdu 610041 China

Funds: 

Supported by the Ferroelectric Films Part of 973 Projects (No.51310Z02)

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  • Author Bio:

    CHEN Zhu research interest includes materials science.

  • Received Date: 2004-03-04
  • Publish Date: 2005-06-24
    Abstract
  • PZT(Zr/Ti=52/48) ferroelectric films are prepared by a new modified Sol-Gel method from three stable-separated Pb2+, Zr4+, Ti4+ precursor-monomers. This method needs no distillation and has the advantage of easy change of the Pb2+/Zr4+/Ti4+ stoichiometric. In the paper we also investigate PT seeds influence on ferroelectric properties, crystallographic structures and surface morphologies, and find the bottom/up PT seeds structure prompte PZT crystallization and have superior ferroeletric properties. The paper introduce a method to deduce and calculate lattice constant by least square method, then the more accurate lattice constant a0 can be got from X-ray diffractometer (XRD) analysis data. We also discover that grain sizes of PZT film calculated from XRD data are much closed to those of AFM, and the film a0 is relatively small due to crushing stress.
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