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DUAN Jianhua, DU Xiaosong, YANG Bangchao, ZHOU Hongren. Study on Manganin High Pressure Array Sensor[J]. Journal of Electronic Science and Technology, 2003, 1(1): 60-62.
Citation: DUAN Jianhua, DU Xiaosong, YANG Bangchao, ZHOU Hongren. Study on Manganin High Pressure Array Sensor[J]. Journal of Electronic Science and Technology, 2003, 1(1): 60-62.
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Study on Manganin High Pressure Array Sensor

  • School of Microelectronics and Solid-State Electronics,UESTC Chengdu 610054 China

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  • Author Bio:

    DUAN Jianhua is currently working on the design of Analog Integrated Circuits and devices, cdyaya@163.com;
    DU Xiaosong, xsdu@uestc.edu.cn;
    YANG Bangchao, bcyang@uestc.edu.cn;
    ZHOU Hongren, zhr-301@163.com.

    DUAN Jianhua is currently working on the design of Analog Integrated Circuits and devices, cdyaya@163.com;
    DU Xiaosong, xsdu@uestc.edu.cn;
    YANG Bangchao, bcyang@uestc.edu.cn;
    ZHOU Hongren, zhr-301@163.com.

    DUAN Jianhua is currently working on the design of Analog Integrated Circuits and devices, cdyaya@163.com;
    DU Xiaosong, xsdu@uestc.edu.cn;
    YANG Bangchao, bcyang@uestc.edu.cn;
    ZHOU Hongren, zhr-301@163.com.

    DUAN Jianhua is currently working on the design of Analog Integrated Circuits and devices, cdyaya@163.com;
    DU Xiaosong, xsdu@uestc.edu.cn;
    YANG Bangchao, bcyang@uestc.edu.cn;
    ZHOU Hongren, zhr-301@163.com.

  • Received Date: 2003-03-13
  • Publish Date: 2003-03-24
    Abstract
  • A new kind of thin film manganin aray gauge is fabricated by adopting a new sensor fabrication technique. The sensitive materials (manganin thin films) are first deposited by magnetron sputtering on fused silica substrates, and then covered by a layer of SiO2 thin films by electron beam evaporation. Based on impedance match method of back configuration, the highest pressure measured in Al target is 51.68 Gpa, the highest pressure in SiO2 package is 35.396 Gpa and the piezoresistance coefficient k is 0.026 Gpa-1. The upper limit and measure precision of sensor is improved.
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