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Tong-Kai Zhao, Qin Feng. Method Investigation for Fabricating Micro-Optical Elements by Use of Half Tone MasksJ. Journal of Electronic Science and Technology, 2010, 8(2): 131-134. DOI: 10.3969/j.issn.1674-862X.2010.02.007
Citation: Tong-Kai Zhao, Qin Feng. Method Investigation for Fabricating Micro-Optical Elements by Use of Half Tone MasksJ. Journal of Electronic Science and Technology, 2010, 8(2): 131-134. DOI: 10.3969/j.issn.1674-862X.2010.02.007
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Method Investigation for Fabricating Micro-Optical Elements by Use of Half Tone Masks

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